Fundamental principles of optical lithography [electronic resource] : the science of microfabrication / Chris Mack.

By: Contributor(s): Material type: TextTextPublication details: Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007.Description: xvii, 515 p. : illSubject(s): Genre/Form: DDC classification:
  • 621.3815/31 22
LOC classification:
  • TK7874 .M196 2007eb
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Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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