Handbook of physical vapor deposition (PVD) processing

Mattox, D. M.

Handbook of physical vapor deposition (PVD) processing [electronic resource] / Donald M. Mattox. - 2nd ed. - Amsterdam : Elsevier, 2010. - xlvi, 746 p. : ill.

Includes bibliographical references and index.


Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2010.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.




Physical vapor deposition--Handbooks, manuals, etc.


Electronic books.

TS695 / .M38 2010eb