Introduction to microfabrication

Franssila, Sami.

Introduction to microfabrication [electronic resource] / Sami Franssila. - 2nd ed. - Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010. - xiv, 518 p. : ill.

Includes index.


Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2010.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.






Microelectromechanical systems.
Electronic apparatus and appliances.
Microfabrication.


Electronic books.

TK7875 / .F73 2010eb

621.381