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Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / [electronic resource] : 5th International Symposium on Silicon Science Fifth International Symposium on Silicon Science International Symposium on Silicon Science 1st International Conference on Advanced Micro-Device Engineering First International Conference on Advanced Micro-Device Engineering International Conference on Advanced Micro-Device Engineering ISSS & AMDE 2009 ISSS 2009 AMDE 2009 edited by Osamu Hanaizumi and Masafumi Unno. - Stafa-Zurich ; Enfield, N.H. : Trans Tech Publications, 2011. - xii, 282 p. : ill. - Key engineering materials, v. 459 1013-9826 ; .

Includes bibliographical references and indexes.


Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2011.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.

ISBN:

LCCN:

Subjects--Topical Terms:
Silicon--Congresses.
Nanostructures--Congresses.
Microelectronics--Congresses.

Index Terms--Genre/Form:
Electronic books.

LC Class. No.: TK7871.15.S55 / I585 2009eb

Dewey Class. No.: 621.381