Transmission electron microscopy in micro-nanoelectronics

Transmission electron microscopy in micro-nanoelectronics [electronic resource] / edited by Alain Claverie. - Hoboken, N.J. : London : John Wiley &Sons, Inc., ; ISTE, 2013. - xiii, 243 p. : ill. - Nanoscience and nanotechnology series .

Includes bibliographical references and index.


Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2015.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.






Transmission electron microscopy.
Nanoelectronics.
Nanotechnology.


Electronic books.

QH212.T7 / T73 2013eb