Lithography

Lithography principles, processes and materials / [electronic resource] : Theodore C. Hennessy, editor. - New York : Nova Science, c2011. - xii, 284 p. : ill. (some col.). - Engineering tools, techniques and tables Nanotechnology science and technology . - Engineering tools, techniques and tables. Nanotechnology science and technology series. .

Includes bibliographical references and index.


Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.






Microlithography.
Microfabrication.


Electronic books.

TK7872.M3 / L58 2011eb

621.3815/31