Lithography
Lithography main techniques / [electronic resource] :
edited by Stefan Landis.
- London : Hoboken, N.J. : ISTE ; Wiley, 2011.
- xxv, 377 p. : ill. (some col.)
Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier.
Includes bibliographical references and index.
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Microlithography.
Electronic books.
TK7872.M3 / L58 2011eb
621.3815/31
Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier.
Includes bibliographical references and index.
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2013.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Microlithography.
Electronic books.
TK7872.M3 / L58 2011eb
621.3815/31