Handbook of 3D integration.
Handbook of 3D integration. Volume 3, 3D process technology /
edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors.
- 1 online resource (475 pages) : illustrations (some color)
Includes bibliographical references at the end of each chapters and index.
9783527670130 (e-book) 9783527670123 (e-book) 9783527670116 (e-book) 9783527670109 (e-book)
Integrated circuits.
Integrated circuits--Design and construction.
Silicon.
Three-dimensional imaging.
Electronic books.
TK7874 / .H363 2014eb
621.3815
Includes bibliographical references at the end of each chapters and index.
9783527670130 (e-book) 9783527670123 (e-book) 9783527670116 (e-book) 9783527670109 (e-book)
Integrated circuits.
Integrated circuits--Design and construction.
Silicon.
Three-dimensional imaging.
Electronic books.
TK7874 / .H363 2014eb
621.3815