Nanofabrication using focused ion and electron beams

Nanofabrication using focused ion and electron beams principles and applications / [electronic resource] : edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell. - Oxford ; New York : Oxford University Press, 2011. - xvi, 813 p. - Nanomanufacturing series ; v. 1 .


Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2011.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.






Nanostructured materials.
Nanotechnology.
Electron beams--Industrial applications.
Ion bombardment--Industrial applications.


Electronic books.

TA418.9.N35 / N2525 2011eb

620.1/15