Capacitive silicon resonators : performance enhancement methods /
Toan, Nguyen Van,
Capacitive silicon resonators : performance enhancement methods / Nguyen Van Toan and Takahito Ono. - 1 online resource.
"Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology"--
9780429266010 0429266014 9780429556524 0429556527 9780429565465 0429565461 9780429560996 0429560990
Dielectric resonators.
Electric resonators.
Nanoelectromechanical systems.
Semiconductors.
TECHNOLOGY / Electricity
TECHNOLOGY / Electronics / Circuits / General
TECHNOLOGY / Electronics / Microelectronics
TK7872.D53 / T63 2020eb
621.3815
Capacitive silicon resonators : performance enhancement methods / Nguyen Van Toan and Takahito Ono. - 1 online resource.
"Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology"--
9780429266010 0429266014 9780429556524 0429556527 9780429565465 0429565461 9780429560996 0429560990
Dielectric resonators.
Electric resonators.
Nanoelectromechanical systems.
Semiconductors.
TECHNOLOGY / Electricity
TECHNOLOGY / Electronics / Circuits / General
TECHNOLOGY / Electronics / Microelectronics
TK7872.D53 / T63 2020eb
621.3815