An introduction to microelectromechanical systems engineering
Maluf, Nadim.
An introduction to microelectromechanical systems engineering [electronic resource] / Nadim Maluf, Kirt Williams. - 2nd ed. - Boston : Artech House, 2004. - xx, 282 p. : ill. - Artech House microelectromechanical systems (MEMS) series . - Microelectromechanical systems series. .
Includes bibliographical references and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2009.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Microelectromechanical systems.
Microtechnology.
Electronic books.
TK7875 / .M35 2004eb
621.381
An introduction to microelectromechanical systems engineering [electronic resource] / Nadim Maluf, Kirt Williams. - 2nd ed. - Boston : Artech House, 2004. - xx, 282 p. : ill. - Artech House microelectromechanical systems (MEMS) series . - Microelectromechanical systems series. .
Includes bibliographical references and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2009.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Microelectromechanical systems.
Microtechnology.
Electronic books.
TK7875 / .M35 2004eb
621.381