Silicon carbide micro electromechanical systems for harsh environments

Silicon carbide micro electromechanical systems for harsh environments [electronic resource] / Silicon carbide microelectromechanical systems for harsh environments editor Rebecca Cheung. - London : Imperial College Press, c2006. - x, 181 p. : ill.

Includes bibliographical references.


Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2009.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.




Microelectromechanical systems.
Silicon carbide.


Electronic books.

TK7875 / .S55 2006eb