Smart mems and sensor systems

Gaura, Elena.

Smart mems and sensor systems [electronic resource] / Elena Gaura & Robert Newman ; with contributions from Michael Kraft, Andrew Flewitt, Davies William de Lima Monteiro. - London : Imperial College Press, c2006. - xii, 539 p. : ill.

Includes bibliographical references and index.


Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2009.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.




Microelectromechanical systems.
Smart structures.


Electronic books.

TK7875 / .G38 2006eb