Handbook of wafer bonding [electronic resource] / edited by Peter Ramm, James Jian-Qiang Lu, and Maaike M.V. Taklo.
Material type:
- TK7871.85 .H36 2012eb
Includes bibliographical references and index.
pt. 1. Technologies -- pt. 2. Applications.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2011. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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