Glancing angle deposition of thin films : engineering the nanoscale / Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett.

By: Contributor(s): Material type: TextTextSeries: Wiley series in materials for electronic and optoelectronic applicationsPublisher: Chichester, England : Wiley, 2014Copyright date: ©2014Description: 1 online resource (316 pages) : illustrations (some color)Content type:
  • text
Media type:
  • computer
Carrier type:
  • online resource
ISBN:
  • 9781118847329 (e-book)
Subject(s): Genre/Form: Additional physical formats: Print version:: Glancing angle deposition of thin films : engineering the nanoscale.DDC classification:
  • 621.3815/2 23
LOC classification:
  • T174.7 .H39 2014eb
Online resources:
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Includes bibliographical references at the end of each chapters and index.

Description based on print version record.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2015. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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