CVD solutions for new directions in SiC and GaN epitaxy / Xun Li.

By: Material type: TextTextSeries: Linkoping studies in science and technology. Dissertations ; ; Number 1654.Publisher: Linkoping, Sweden : Semiconductor Materials Division Department of Physics, Chemistry and Biology (IFM), Linkoping University, 2015Copyright date: 2015Description: 1 online resource (55 pages)Content type:
  • text
Media type:
  • computer
Carrier type:
  • online resource
ISBN:
  • 9789175190846 (e-book)
Subject(s): Genre/Form: DDC classification:
  • 621.38152 23
LOC classification:
  • TK7871.85 .L5 2015
Online resources:
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Includes bibliographical references.

Description based on online resource; title from PDF title page (ebrary, viewed June 10, 2015).

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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