Beam technologies for integrated processing [electronic resource] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

By: Contributor(s): Material type: TextTextPublication details: Washington, D.C. : National Academy Press, 1992.Description: xii, 89 p. : illSubject(s): Genre/Form: DDC classification:
  • 621.381 20
LOC classification:
  • TK7836 .N37 1992eb
Online resources:
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"NMAB-461."

Includes bibliographical references.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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