Microelectromechanical systems [electronic resource] : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

By: Contributor(s): Material type: TextTextPublication details: Washington, DC : National Academy Press, 1997.Description: xiv, 61 p. : illSubject(s): Genre/Form: DDC classification:
  • 621.381 21
LOC classification:
  • TK7874 .N333 1997eb
Online resources:
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Includes bibliographical references (p. 51-55).

Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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