TY  - BOOK
AU  - Lindroos,Veikko
ED  - ebrary, Inc.
TI  - Handbook of silicon based MEMS materials and technologies
T2  - Micro & nano technologies
AV  - TK7875 .H36 2010eb
PY  - 2010///
CY  - Amsterdam, Boston
PB  - William Andrew/Elsevier
KW  - Microelectromechanical systems
KW  - Materials
KW  - Silicon
KW  - Electric properties
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2011; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/daystar/Doc?id=10378866
ER  -