Campanella, Humberto. <br/><br/>
FBAR, MEMS and NEMS resonator design and applications  [electronic resource] / 
Humberto Campanella. 
 - Boston :  Artech House,  c2010. 
 - xv, 345 p. :  ill. 
<br/><br/> Includes index. 
<br/><br/><br/>Electronic reproduction. <br/>Palo Alto, Calif. : <br/>ebrary, <br/>2010. <br/>Available via World Wide Web. <br/>Access may be limited to ebrary affiliated libraries. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Acoustic surface wave devices.<br/>Electric resonators.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK5981  / .C36 2010eb