TY  - BOOK
AU  - Qin,Yi
ED  - ebrary, Inc.
TI  - Micro-manufacturing engineering and technology
T2  - Micro & nano technologies series
AV  - TS176 .M53 2010eb
PY  - 2010///
CY  - Amsterdam
PB  - Elsevier
KW  - Production engineering
KW  - Manufacturing processes
KW  - Microtechnology
KW  - Manufactures
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2010; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/daystar/Doc?id=10404660
ER  -