Mattox, D. M. <br/><br/>
Handbook of physical vapor deposition (PVD) processing  [electronic resource] / 
Donald M. Mattox. 
 - 2nd ed. 
 - Amsterdam :  Elsevier,  2010. 
 - xlvi, 746 p. :  ill. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><br/>Electronic reproduction. <br/>Palo Alto, Calif. : <br/>ebrary, <br/>2010. <br/>Available via World Wide Web. <br/>Access may be limited to ebrary affiliated libraries. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Physical vapor deposition--Handbooks, manuals, etc.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TS695  / .M38 2010eb