TY  - BOOK
AU  - Mattox,D.M.
ED  - ebrary, Inc.
TI  - Handbook of physical vapor deposition (PVD) processing
AV  - TS695 .M38 2010eb
PY  - 2010///
CY  - Amsterdam
PB  - Elsevier
KW  - Physical vapor deposition
KW  - Handbooks, manuals, etc
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2010; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/daystar/Doc?id=10408179
ER  -