Franssila, Sami. <br/><br/>
Introduction to microfabrication  [electronic resource] / 
Sami Franssila. 
 - 2nd ed. 
 - Chichester, West Sussex, England ;  Hoboken, NJ :  John Wiley & Sons,  2010. 
 - xiv, 518 p. :  ill. 
<br/><br/> Includes index. 
<br/><br/><br/>Electronic reproduction. <br/>Palo Alto, Calif. : <br/>ebrary, <br/>2010. <br/>Available via World Wide Web. <br/>Access may be limited to ebrary affiliated libraries. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>LCCN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Electronic apparatus and appliances.<br/>Microfabrication.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7875  / .F73 2010eb 
<br/><br/><label>Dewey Class. No.: </label>621.381