TY  - BOOK
AU  - Franssila,Sami
ED  - ebrary, Inc.
TI  - Introduction to microfabrication
AV  - TK7875 .F73 2010eb
U1  - 621.381 22
PY  - 2010///
CY  - Chichester, West Sussex, England, Hoboken, NJ
PB  - John Wiley & Sons
KW  - Microelectromechanical systems
KW  - Electronic apparatus and appliances
KW  - Microfabrication
KW  - Electronic books
KW  - local
N1  - Includes index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2010; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/daystar/Doc?id=10419414
ER  -