Trends in nano- and micro-cavities  [electronic resource] / 
edited by O'Dae Kwon, Byoungho Lee, Kyungwon An. 
 - Hilversum, The Netherlands :  Bentham Science Publishers,  2011. 
 - viii, 321 p. :  ill. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><br/>Electronic reproduction. <br/>Palo Alto, Calif. : <br/>ebrary, <br/>2011. <br/>Available via World Wide Web. <br/>Access may be limited to ebrary affiliated libraries. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology.<br/>Microelectromechanical systems.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>T174.7  / .T74 2011eb