TY - BOOK AU - Kwon,O'Dae AU - Lee,Byoungho AU - An,Kyungwon ED - ebrary, Inc. TI - Trends in nano- and micro-cavities AV - T174.7 .T74 2011eb PY - 2011/// CY - Hilversum, The Netherlands PB - Bentham Science Publishers KW - Nanotechnology KW - Microelectromechanical systems KW - Electronic books KW - local N1 - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2011; Available via World Wide Web; Access may be limited to ebrary affiliated libraries UR - http://site.ebrary.com/lib/daystar/Doc?id=10504673 ER -