Kang, Shinill.
Micro/nano replication processes and applications / [electronic resource] :
Shinill Kang.
- Hoboken, N.J. : Wiley, c2012.
- xv, 367 p. : ill.
Includes index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2011.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Nanotechnology.
Manufacturing processes--Technological innovations.
Research, Industrial.
Electronic books.
T174.7 / .K36 2012eb
620/.5