Kang, Shinill.

Micro/nano replication processes and applications / [electronic resource] : Shinill Kang. - Hoboken, N.J. : Wiley, c2012. - xv, 367 p. : ill.

Includes index.


Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2011.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.






Nanotechnology.
Manufacturing processes--Technological innovations.
Research, Industrial.


Electronic books.

T174.7 / .K36 2012eb

620/.5