Cost-driven design of smart microsystems [electronic resource] /
Michael Niedermayer.
- Boston : Artech House, c2012.
- xii, 229 p. : ill.
- Artech House integrated microsystems series .
- Artech House integrated microsystems series. .
Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
Microelectromechanical systems. Intelligent control systems--Design and construction.