TY - BOOK AU - Niedermayer,Michael ED - ebrary, Inc. TI - Cost-driven design of smart microsystems T2 - Artech House integrated microsystems series AV - TK7875 .N54 2012eb PY - 2012/// CY - Boston PB - Artech House KW - Microelectromechanical systems KW - Intelligent control systems KW - Design and construction KW - Electronic books KW - local N1 - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2013; Available via World Wide Web; Access may be limited to ebrary affiliated libraries UR - http://site.ebrary.com/lib/daystar/Doc?id=10555780 ER -