Transmission electron microscopy in micro-nanoelectronics [electronic resource] /
edited by Alain Claverie.
- Hoboken, N.J. : London : John Wiley &Sons, Inc., ; ISTE, 2013.
- xiii, 243 p. : ill.
- Nanoscience and nanotechnology series .
Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2015. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
Transmission electron microscopy. Nanoelectronics. Nanotechnology.