Lithography  principles, processes and materials /  [electronic resource] : 
Theodore C. Hennessy, editor. 
 - New York :  Nova Science,  c2011. 
 - xii, 284 p. :  ill. (some col.). 
 - Engineering tools, techniques and tables Nanotechnology science and technology .
 - Engineering tools, techniques and tables. Nanotechnology science and technology series. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><br/>Electronic reproduction. <br/>Palo Alto, Calif. : <br/>ebrary, <br/>2013. <br/>Available via World Wide Web. <br/>Access may be limited to ebrary affiliated libraries. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>LCCN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography.<br/>Microfabrication.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7872.M3  / L58 2011eb 
<br/><br/><label>Dewey Class. No.: </label>621.3815/31