TY  - BOOK
AU  - Landis,Stefan
ED  - ebrary, Inc.
TI  - Lithography: main techniques 
AV  - TK7872.M3 L58 2011eb
U1  - 621.3815/31 22
PY  - 2011///
CY  - London, Hoboken, N.J.
PB  - ISTE, Wiley
KW  - Microlithography
KW  - Electronic books
KW  - local
N1  - Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier; Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2013; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
N2  - "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--
UR  - http://site.ebrary.com/lib/daystar/Doc?id=10671590
ER  -