Micro, nanosystems, and systems on chips  modeling, control, and estimation /  [electronic resource] 
edited by Alina Voda. 
 - London :  Hoboken, N.J. :  ISTE ;  Wiley,  c2010. 
 - 1 online resource (xii, 308 p.) :  ill. (some col.), charts. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><br/>Electronic reproduction. <br/>Palo Alto, Calif. : <br/>ebrary, <br/>2013. <br/>Available via World Wide Web. <br/>Access may be limited to ebrary affiliated libraries. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Systems on a chip.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7875  / .M532487 2010eb 
<br/><br/><label>Dewey Class. No.: </label>621.381