Ree, Moonhor. <br/><br/>
Low-k nanoporous interdielectrics  materials, thin film fabrications, structures and properties /  [electronic resource] : 
Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo. 
 - Hauppauge, N.Y. :  Nova Science Publishers,  c2010. 
 - 67 p. :  ill. 
 - Nanotechnology science and technology .
 - Nanotechnology science and technology series. .
<br/><br/>Includes bibliographical references (p. [51]-61) and index. 
<br/><br/><br/>Electronic reproduction. <br/>Palo Alto, Calif. : <br/>ebrary, <br/>2013. <br/>Available via World Wide Web. <br/>Access may be limited to ebrary affiliated libraries. 
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<br/><br/><label>Subjects--Topical Terms: </label><br/>Dielectric films.<br/>Microelectronics--Materials.<br/>Porous materials.<br/>Interconnects (Integrated circuit technology)
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7871.15.F5  / R44 2010eb 
<br/><br/><label>Dewey Class. No.: </label>621.381