TY  - BOOK
AU  - Ree,Moonhor
AU  - Yoon,Jinhwan
AU  - Heo,Kyuyoung
ED  - ebrary, Inc.
TI  - Low-k nanoporous interdielectrics: materials, thin film fabrications, structures and properties 
T2  - Nanotechnology science and technology
AV  - TK7871.15.F5 R44 2010eb
U1  - 621.381 22
PY  - 2010///
CY  - Hauppauge, N.Y.
PB  - Nova Science Publishers
KW  - Dielectric films
KW  - Microelectronics
KW  - Materials
KW  - Porous materials
KW  - Interconnects (Integrated circuit technology)
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references (p. [51]-61) and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2013; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/daystar/Doc?id=10675006
ER  -