TY  - BOOK
AU  - Kaariainen,Tommi
ED  - ebrary, Inc.
TI  - Atomic layer deposition: principles, characteristics, and nanotechnology applications 
AV  - TS695 .K33 2013eb
U1  - 620/.5 23
PY  - 2013///
CY  - Hoboken, NJ
PB  - John Wiley & Sons
KW  - Chemical vapor deposition
KW  - Epitaxy
KW  - Microelectronics
KW  - Nanotechnology
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2013; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/daystar/Doc?id=10715316
ER  -