TY  - BOOK
AU  - Vilaithong,Thiraphat
AU  - Boonyawan,D.
AU  - Thongbai,C.
ED  - PIM & ASIP 2004
TI  - Particle beams & plasma interaction on materials and ion & plasma finishing 2004: proceedings of PIM & ASIP 2004, 25-27 November 2004, Chiang Mai, Thailand 
T2  - Diffusion and defect data - solid state data. Pt. B, Solid state phenomena,
AV  - QC793.3.B4 P37 2005eb
U1  - 621.044 22
PY  - 2005///]
CY  - Uetikon-Zuerich
PB  - Trans Tech Publications
KW  - Plasma engineering
KW  - Congresses
KW  - Electronic books
N1  - Includes bibliographical references and index
UR  - http://site.ebrary.com/lib/daystar/Doc?id=10828918
ER  -