Handbook of 3D integration. Volume 3, 3D process technology - Garrou, Philip; Koyanagi, Mitsumasa; Ramm, Peter; Allen, Ricky (Weinheim, Germany : Wiley-VCH, 2014)
Includes bibliographical references at the end of each chapters and index.
Description based on online resource; title from PDF title page (ebrary, viewed May 5, 2014).
Electronic reproduction. Palo Alto, Calif. : ebrary, 2015. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
Keywords: Integrated circuits; Integrated circuits -- Design and construction; Silicon; Three-dimensional imaging; Electronic books