Castaņer, Luis, <br/><br/>
Understanding MEMS :  principles and applications / 
Luis Castaņer. 
 - 1 online resource (398 pages) :  illustrations 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9781119055495 (e-book) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7875  / .C37 2016eb 
<br/><br/><label>Dewey Class. No.: </label>621.381