TY  - BOOK
AU  - Utke,Ivo
AU  - Moshkalev,Stanislav
AU  - Russell,Phillip
ED  - ebrary, Inc.
TI  - Nanofabrication using focused ion and electron beams: principles and applications 
T2  - Nanomanufacturing series
AV  - TA418.9.N35 N2525 2011eb
U1  - 620.1/15 23
PY  - 2011///
CY  - Oxford, New York
PB  - Oxford University Press
KW  - Nanostructured materials
KW  - Nanotechnology
KW  - Electron beams
KW  - Industrial applications
KW  - Ion bombardment
KW  - Electronic books
KW  - local
N1  - Electronic reproduction; Palo Alto, Calif.; ebrary; 2011; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/daystar/Doc?id=10532647
ER  -