TY  - BOOK
AU  - Yazdanfar,Milan
TI  - Precursors and defect control for halogenated CVD of thick SiC epitaxial layers
T2  - Linkoping Studies in Science and Technology Dissertations,
SN  - 9789175192130 (e-book)
AV  - TK7871.15.S56 .Y393 2014
U1  - 546.6832 23
PY  - 2014///
CY  - Linkoping, Sweden
PB  - Linkoping University
KW  - Silicon carbide
KW  - Research
KW  - Electronic books
N1  - Includes bibliographical references
UR  - http://ebookcentral.proquest.com/lib/daystar-ebooks/detail.action?docID=3328156
ER  -