Bao, Min-Hang. <br/><br/>
Analysis and design principles of MEMS devices  [electronic resource] / 
by Minhang Bao. 
 - Amsterdam ;  Oxford :  Elsevier,  c2005. 
 - xii, 312 p. :  ill. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><br/>Electronic reproduction. <br/>Palo Alto, Calif. : <br/>ebrary, <br/>2009. <br/>Available via World Wide Web. <br/>Access may be limited to ebrary affiliated libraries. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>Nat. Bib. No.: </label>GBA515718  bnb 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Microtechnology.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7875  / .B36 2005eb 
<br/><br/><label>Dewey Class. No.: </label>621.381