Silicon carbide micro electromechanical systems for harsh environments  [electronic resource] / 
 Silicon carbide microelectromechanical systems for harsh environments 
editor Rebecca Cheung. 
 - London :  Imperial College Press,  c2006. 
 - x, 181 p. :  ill. 
<br/><br/>Includes bibliographical references. 
<br/><br/><br/>Electronic reproduction. <br/>Palo Alto, Calif. : <br/>ebrary, <br/>2009. <br/>Available via World Wide Web. <br/>Access may be limited to ebrary affiliated libraries. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Silicon carbide.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7875  / .S55 2006eb