TY  - BOOK
AU  - Cheung,Rebecca
ED  - ebrary, Inc.
TI  - Silicon carbide micro electromechanical systems for harsh environments
AV  - TK7875 .S55 2006eb
PY  - 2006///
CY  - London
PB  - Imperial College Press
KW  - Microelectromechanical systems
KW  - Silicon carbide
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references; Electronic reproduction; Palo Alto, Calif.; ebrary; 2009; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/daystar/Doc?id=10201168
ER  -