Gaura, Elena. <br/><br/>
Smart mems and sensor systems  [electronic resource] / 
Elena Gaura & Robert Newman ; with contributions from Michael Kraft, Andrew Flewitt, Davies William de Lima Monteiro. 
 - London :  Imperial College Press,  c2006. 
 - xii, 539 p. :  ill. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><br/>Electronic reproduction. <br/>Palo Alto, Calif. : <br/>ebrary, <br/>2009. <br/>Available via World Wide Web. <br/>Access may be limited to ebrary affiliated libraries. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Smart structures.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7875  / .G38 2006eb