TY - BOOK AU - Gaura,Elena AU - Newman,Robert M. ED - ebrary, Inc. TI - Smart mems and sensor systems AV - TK7875 .G38 2006eb PY - 2006/// CY - London PB - Imperial College Press KW - Microelectromechanical systems KW - Smart structures KW - Electronic books KW - local N1 - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2009; Available via World Wide Web; Access may be limited to ebrary affiliated libraries UR - http://site.ebrary.com/lib/daystar/Doc?id=10201291 ER -