Handbook of vacuum science and technology  [electronic resource] / 
edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III. 
 - San Diego, CA :  Academic Press,  c1998. 
 - xxii, 835 p. :  ill. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><br/>Electronic reproduction. <br/>Palo Alto, Calif. : <br/>ebrary, <br/>2009. <br/>Available via World Wide Web. <br/>Access may be limited to ebrary affiliated libraries. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>LCCN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Vacuum technology--Handbooks, manuals, etc.<br/>Mechanical engineering.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TJ940  / .H59 1998eb