TY  - BOOK
AU  - Hoffman,Dorothy M.
AU  - Singh,Bawa
AU  - Thomas,John H.
ED  - ebrary, Inc.
TI  - Handbook of vacuum science and technology
AV  - TJ940 .H59 1998eb
PY  - 1998///
CY  - San Diego, CA
PB  - Academic Press
KW  - Vacuum technology
KW  - Handbooks, manuals, etc
KW  - Mechanical engineering
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2009; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/daystar/Doc?id=10201808
ER  -