Handbook of vacuum science and technology [electronic resource] / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III.

Contributor(s): Material type: TextTextPublication details: San Diego, CA : Academic Press, c1998.Description: xxii, 835 p. : illSubject(s): Genre/Form: LOC classification:
  • TJ940 .H59 1998eb
Online resources:
Tags from this library: No tags from this library for this title. Log in to add tags.
Star ratings
    Average rating: 0.0 (0 votes)
No physical items for this record

Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

There are no comments on this title.

to post a comment.